Ulvac NE-950EX-V (CCP Etcher)

Make: Ulvac
Model: NE-950EX-V
DOM: 2015
Reference No.: 231CC

Key Features:

  • Capable of running a single 300mm wafer or three 150mm wafers at a time
  • Fully automated cassette to cassette handling
  • 3 wafers batch processing availability in 6inch dia.
  • 7 wafers batch processing availability in 4inch dia.
  • 12 wafers batch processing availability in 3 inch dia.
  • 29 wafers batch processing availability in 2 inch dia.
  • Equipped with ICP with magnetic field (ISM *1), high density plasma source which has a delivery record of over 600 chambers.*1:ULVAC Patent No.3188353
  • Proprietary Star electrode *2:ULVAC Patent No.3429391
  • Easy Maintenance, stability, and reliability are achieved through re-deposition prevention.
  • Dry etching technology availability for various process application. (GaN, Sapphire, Metal, ITO, SiC, AlN, ZnO, 4 elements compound semiconductor materials, etc.)
  • Various system options available

Condition: Like New Complete & Operational
Availability: Immediate for purchase / 2-6 weeks for shipping

Actual Machine Photos:

Contact Cardinal Circuit using the form below or email sales@cardinalcircuit.com for additional information or inquiries.

FAST response, within an hour or less.